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Rapid thermal processing

Rapid thermal processing science and technology / [electronic resource] : edited by Richard B. Fair. - Boston : Academic Press, c1993. - viii,430p. ill.

Includes bibliographical references and index.

License restrictions may limit access.

ISBN: 0122476905 (acidfree paper) = Rapid thermal processing

Subjects--Topical Terms:
Semiconductors--Electrical engineering ,Electronics .Nuclear engineering
Semiconductor doping.
Rapid thermal processing.

LC Class. No.: TK7871.85 / .F299 1993

Dewey Class. No.: 621.3815/2

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