An introduction to semiconductor microtechnology /

Morgan, D. V.

An introduction to semiconductor microtechnology / D.V. Morgan, K. Board. - 2nd ed. - Chichester [West Sussex] ; New York : Wiley, c1983. - xii, 167 p. : ill. ; 23 cm.

"A Wiley-Interscience publication." Includes index.

Bibliography: p. 157-158.

0471901482 (pbk.)

82024788


Semiconductors--Electrical engineering ,Electronics .Nuclear engineering

TK7871.85 / .M585 1983

621.3815/2