Metallization :

Murarka, S. P.

Metallization : theory and practice for VLSI and ULSI / Shyam P. Murarka. - Boston Butterworth-Heinemann, c1993. - vi, 250 p. : ill. ; 26 cm.

Includes bibliographical references and index.

0750690011 (acidfree paper)

92033603


Integrated circuits--Electrical engineering, Electronics. Nuclear engineering
Metallizing.

TK7874 / .M868 1993

621.39/5