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Vacuum technology, thin films, and sputtering :

Stuart, R. V.

Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart. - New York : Academic Press, 1983. - viii, 151 p. : ill. ; 24 cm.

Includes index.

ISBN: 0126747806

LCCN: 82013748

Subjects--Topical Terms:
Vacuum technology.--Chemical technology
Thin films.
Cathode sputtering (Plating process)

LC Class. No.: TP156.V3 / S78 1983

Dewey Class. No.: 621.5/5

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