Etching of III-V semiconductors :

Notten, P. H. L.

Etching of III-V semiconductors : an electrochemical approach / P.H.L. Notten, J.E.A.M. van den Meerakker, J.J. Kelly. - Oxford, UK : New York, NY, USA : Elsevier Advanced Technology ; Distributed in the USA and Canada by Elsevier Science Pub. Co., c1991. - xiv, 349 p. : ill. ; 25 cm.

Includes bibliographical references and indexes.

0946395845

90042266


Semiconductors--Etching.
Electrochemistry.

TK7871.85 / .N674 1990

621.381/52