01229nam a2200325 4500 10563449 20150330154357.0 m d cr n 000 0122476905 (acidfree paper) (WaSeSS)ssj0000786613 UOEL DLC DLC WaSeSS TK7871.85 .F299 1993 621.3815/2 20 Rapid thermal processing Rapid thermal processing [electronic resource] : science and technology / edited by Richard B. Fair. Boston : Academic Press, c1993. viii,430p. ill. Includes bibliographical references and index. License restrictions may limit access. Semiconductors Electrical engineering ,Electronics .Nuclear engineering Heat treatment Semiconductor doping. Rapid thermal processing. Fair, Richard B. ScienceDirect Engineering eBook Legacy Collection http://www.columbia.edu/cgi-bin/cul/resolve?clio10563449 Full text available from ScienceDirect Engineering eBook Legacy Collection Library of Congress record lcc LL 3452 3452 0 0 lcc 0 0 UOE UOE GEN 2015-03-30 0 TK7871.85 .F299 1993 10052767 2015-03-30 00:00:00 10052767 2015-03-30 LL