TY  - BOOK
AU  - Morgan,D.V.
AU  - Board,K.
TI  - An introduction to semiconductor microtechnology
SN  - 0471901482 (pbk.)
AV  - TK7871.85 .M585 1983
U1  - 621.3815/2 19
PY  - 1983///
CY  - Chichester [West Sussex], New York
PB  - Wiley
KW  - Semiconductors
KW  - Electrical engineering ,Electronics .Nuclear engineering
KW  - Design and construction
N1  - "A Wiley-Interscience publication."; Includes index; Bibliography: p. 157-158
ER  -