01132nam a2200277 4500 1460123 20150330160430.0 000 86003524 0120771209 UOEL DLC DLC TK7871.85 .E65 1986 621.3815/2 19 Epitaxial silicon technology / edited by B. Jayant Baliga. Orlando : Academic Press, 1986. viii, 328 p. : ill. ; 24 cm. Includes bibliographies and index. Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam. Semiconductors Electrical engineering, Electronics .Nuclear engineering Design and contruction Silicon crystals Growth. Epitaxy. Silicon-on-insulator technology. Baliga, B. Jayant, 1948- 7 cbc orignew 1 ocip 19 y-gencatlg lcc LL 3469 3469 0 0 lcc 0 0 UOE UOE GEN 2015-03-30 0 TK7871.85 .E65 1986 10018197 2015-03-30 00:00:00 10018197 2015-03-30 LL