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  <titleInfo>
    <title>Epitaxial silicon technology</title>
  </titleInfo>
  <name type="personal">
    <namePart>Baliga, B. Jayant</namePart>
    <namePart type="date">1948-</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="text">Orlando</placeTerm>
    </place>
    <publisher>Academic Press</publisher>
    <dateIssued>1986</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <physicalDescription>
    <extent>viii, 328 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <tableOfContents>Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.</tableOfContents>
  <note type="statement of responsibility">edited by B. Jayant Baliga.</note>
  <note>Includes bibliographies and index.</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Electrical engineering, Electronics .Nuclear engineering</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Silicon crystals</topic>
    <topic>Growth</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Epitaxy</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Silicon-on-insulator technology</topic>
  </subject>
  <classification authority="lcc">TK7871.85 .E65 1986</classification>
  <classification authority="ddc" edition="19">621.3815/2</classification>
  <identifier type="isbn">0120771209</identifier>
  <identifier type="lccn">86003524</identifier>
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    <recordCreationDate encoding="marc">000</recordCreationDate>
    <recordChangeDate encoding="iso8601">20150330160430.0</recordChangeDate>
    <recordIdentifier>1460123</recordIdentifier>
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