00941nam a2200253 4500 4396896 20150407111718.0 000 92033603 0750690011 (acidfree paper) UOEL DLC DLC TK7874 .M868 1993 621.39/5 20 Murarka, S. P. Metallization : theory and practice for VLSI and ULSI / Shyam P. Murarka. Boston Butterworth-Heinemann, c1993. vi, 250 p. : ill. ; 26 cm. Includes bibliographical references and index. Integrated circuits Electrical engineering, Electronics. Nuclear engineering Very large scale integration Metallizing. 7 cbc orignew 1 ocip 19 y-gencatlg lcc LL 3889 3889 0 0 lcc 0 0 UOE UOE GEN 2015-04-07 0 TK7874 .M868 1993 10056794 2015-04-07 00:00:00 10056794 2015-04-07 LL