@book{4552,
	author = {Stuart, R. V.},
	title = {Vacuum technology, thin films, and sputtering :},
	publisher = {Academic Press,},
	year = {1983.},
	address = {New York :},
	note = {Includes index.},
	url = {http://www.loc.gov/catdir/description/els032/82013748.html}
}