TY  - BOOK
AU  - Stuart,R.V.
TI  - Vacuum technology, thin films, and sputtering: an introduction 
SN  - 0126747806
AV  - TP156.V3 S78 1983
U1  - 621.5/5 19
PY  - 1983///
CY  - New York
PB  - Academic Press
KW  - Vacuum technology
KW  - Chemical technology
KW  - Thin films
KW  - Cathode sputtering (Plating process)
N1  - Includes index
UR  - http://www.loc.gov/catdir/description/els032/82013748.html
UR  - http://www.loc.gov/catdir/toc/els031/82013748.html
ER  -