TY  - BOOK
AU  - Notten,P.H.L.
AU  - Meerakker,J.E.A.M.van den
AU  - Kelly,J.J.
TI  - Etching of III-V semiconductors: an electrochemical approach 
SN  - 0946395845
AV  - TK7871.85 .N674 1990
U1  - 621.381/52 20
PY  - 1991///
CY  - Oxford, UK, New York, NY, USA
PB  - Elsevier Advanced Technology, Distributed in the USA and Canada by Elsevier Science Pub. Co.
KW  - Semiconductors
KW  - Etching
KW  - Electrochemistry
N1  - Includes bibliographical references and indexes
ER  -