TY  - BOOK
AU  - Hitchman,Michael L.
AU  - Jensen,Klavs F.
TI  - Chemical vapor deposition: principles and applications 
SN  - 0123496705
AV  - TS695 .C54 1993
U1  - 620/.44 20
PY  - 1993///
CY  - London, San Diego
PB  - Academic Press
KW  - Chemical vapor deposition
KW  - Manufactures
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/description/els032/93125773.html
UR  - http://www.loc.gov/catdir/toc/els032/93125773.html
ER  -