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Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. by Series: ACS symposium series ; 266
Material type: Text
Publication details: Washington, D.C. : The Society, c1984
Availability: Items available for loan: UOE Main Library (4)Call number: TK7871.15.P6 M37 1984, ...
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Microelectronic Systems Level III / D. J, Woollons by
Edition: Low-Priced edition
Material type: Text
Publication details: London , English Language Book Society , c1982
Availability: Items available for loan: UOE Main Library (1)Call number: TK874 .W6 1982..
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