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Metallization : theory and practice for VLSI and ULSI / Shyam P. Murarka.

By: Material type: TextTextPublication details: Boston Butterworth-Heinemann, c1993.Description: vi, 250 p. : ill. ; 26 cmISBN:
  • 0750690011 (acidfree paper)
Subject(s): DDC classification:
  • 621.39/5 20
LOC classification:
  • TK7874 .M868 1993
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Holdings
Item type Current library Call number Copy number Status Barcode
Loan - Normal on open shelf Loan - Normal on open shelf UOE Main Library Open shelf TK7874 .M868 1993 (Browse shelf(Opens below)) 10056794 Available 10056794
Total holds: 0

Includes bibliographical references and index.

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