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Plasma etching :

Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm. - Boston : Academic Press, c1989. - xii, 476 p. : ill. ; 24 cm. - Plasma -- materials interactions .

Includes bibliographical references and index.

ISBN: 0124693709 (alk. paper)

LCCN: 87037419

Subjects--Topical Terms:
Plasma etching.

LC Class. No.: TA2020 / .P5 1989

Dewey Class. No.: 621.044

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