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Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm.

Contributor(s): Material type: TextTextSeries: Plasma -- materials interactionsPublication details: Boston : Academic Press, c1989.Description: xii, 476 p. : ill. ; 24 cmISBN:
  • 0124693709 (alk. paper)
Subject(s): DDC classification:
  • 621.044 19
LOC classification:
  • TA2020 .P5 1989
Online resources:
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Holdings
Item type Current library Call number Copy number Status Date due Barcode Item holds
Loan - Normal on open shelf Loan - Normal on open shelf UOE Main Library Open shelf TA2020 .P5 1989 (Browse shelf(Opens below)) 10052772 Available 10052772
Total holds: 0

Includes bibliographical references and index.

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